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Eliminating Leakage Currents in 3C-SiC/Si Devices Through the Fabrication of Suspended Structures

https://davku.lnx.warwick.ac.uk/files/original/cc871ec8931148b2c94e7ad7e3ee2e18.pdf

Tags: 3C-SiC/Si devices, fabrication, leakage currents, microelectromechanical systems

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